JPH0244161Y2 - - Google Patents
Info
- Publication number
- JPH0244161Y2 JPH0244161Y2 JP8456484U JP8456484U JPH0244161Y2 JP H0244161 Y2 JPH0244161 Y2 JP H0244161Y2 JP 8456484 U JP8456484 U JP 8456484U JP 8456484 U JP8456484 U JP 8456484U JP H0244161 Y2 JPH0244161 Y2 JP H0244161Y2
- Authority
- JP
- Japan
- Prior art keywords
- scanning direction
- printed wiring
- mark
- wiring board
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 34
- 238000007689 inspection Methods 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 24
- 238000000034 method Methods 0.000 description 12
- 238000004364 calculation method Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 4
- 230000001186 cumulative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8456484U JPS618U (ja) | 1984-06-06 | 1984-06-06 | プリント配線板の位置ずれ検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8456484U JPS618U (ja) | 1984-06-06 | 1984-06-06 | プリント配線板の位置ずれ検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS618U JPS618U (ja) | 1986-01-06 |
| JPH0244161Y2 true JPH0244161Y2 (en]) | 1990-11-22 |
Family
ID=30634186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8456484U Granted JPS618U (ja) | 1984-06-06 | 1984-06-06 | プリント配線板の位置ずれ検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS618U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2611251B2 (ja) * | 1987-08-28 | 1997-05-21 | 株式会社ニコン | 基板搬送装置 |
-
1984
- 1984-06-06 JP JP8456484U patent/JPS618U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS618U (ja) | 1986-01-06 |
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